Litho Products

Welcome to the homepage for the Semiconductor Equipment Division of Canon USA.

Please visit this site often for updated information and news about products, technologies, and services offered by Canon.

Based in San Jose, California, the Canon USA Semiconductor Equipment Division supplies i-line Steppers and Deep UV (DUV) Scanners that are used in the production of high-tech devices including integrated circuits, hard disk read/write heads, Microelectromechanical Systems (MEMS) devices, image sensors, displays and LEDs.
Canon photolithography equipment has also been developed to support the demands of Advanced Packaging, Through-Silicon Vias (TSV), Silicon Interposer and 3D Integration applications.

Canon has the resources and the commitment to develop ultra-precision imaging technologies and to find smarter ways to apply them to achieve the highest performance and value.
This smarter thinking is Enlightened Lithography--the unique Canon value that ensures the best return on our customers' investment.

For support, service and product inquiries, please contact

View AllDUV Scanners

DUV Scanners

KrF (248nm wavelength)

Canon KrF scanners are key IC production tools with enhanced lens capabilities and mechanical advancements that support sub-wavelength imaging techniques.

View AllSteppers

i-Line (365nm wavelength)
Canon i-line steppers provide a cost-effective imaging solution for applications requiring sub-350nm resolution.